METHOD OF MANUFACTURE OF VACUUM TABLE,申请号SU19904780029-传众专利搜索

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发明名称	METHOD OF MANUFACTURE OF VACUUM TABLE
摘要
申请公布号	SU1734135(A1)	申请公布日期	1992.05.15
申请号	SU19904780029	申请日期	1990.01.08
申请人	K BYURO TOCHNOGO ELEKTRONNOGO MASHINOSTROENIYA	发明人	ZHUKOVICH PETR M,SU;GURINOVICH ALBINA A,SU;SAMAL ALEKSANDR M,SU
分类号	H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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