摘要 |
<p>An accelerometer (60) includes a first proof mass (32') and a second proof mass (42'), which are respectively connected by flexures (36' and 46') to a first base (34') and a second base (44'). The first and second bases are clamped between a top enclosure (62) and a bottom enclosure (64), between which is defined a cavity (66) in which the first and second proof masses are disposed. A quartz crystal resonator (38') extends between the first proof mass and the first base; similarly, a quartz crystal resonator (48') extends between the second proof mass and second base. The quartz crystal resonators experience tension/compression in a push-pull mode when the accelerometer is subjected to acceleration along an acceleration-sensitive axis (26') that extends transversely through the proof-masses. A fluid within the cavity couples the first and second proof masses together through a ''squeeze film damping'', due to their closely-spaced relationship to each other.</p> |