| 摘要 |
A capacitive plasma discharge is produced by a pair of electrodes (FA, FB) spaced in a vacuum chamber (1) whose wall (3) is divided into two parts (5, 9) with insulators (7) between them. The upper wall (5) is connected through a decoupling capacitor (C) to a high-frequency AC generator (11), and the lower wall (9) is earthed. Workpieces (12, 13) are laid on the smaller electrode (FB) for etching, or on the larger electrode (FA) for coating purposes.
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