THIN FILM FORMING APPARATUS AND ION SOURCE UTILIZING SPUTTERING WITH MICROWAVE PLASMA,申请号KR19890001399-传众专利搜索

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发明名称	THIN FILM FORMING APPARATUS AND ION SOURCE UTILIZING SPUTTERING WITH MICROWAVE PLASMA
摘要
申请公布号	KR920003790(B1)	申请公布日期	1992.05.14
申请号	KR19890001399	申请日期	1989.02.08
申请人	NIPPON TELEGRAPH AND TELEPHONE CORP.	发明人	MATSUOKA, MORITO;ONO, KENICHI
分类号	C23C14/35;H01J27/18;H01J37/34;(IPC1-7):C23C14/22	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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