| 摘要 |
<p>A reduced pressure reaction chamber (100) allows rotation and translation of a workpiece (108), using a sealed rotate and translate actuator (114). The reaction chamber (103) has rigid walls (111), and is particularly suited to reduced pressure systems. The actuator includes a shaft (116) coupled through the wall by a vacuum rotary feed-through mechanism (115). A sleeve (215) is mounted over the shaft (210) and coupled to the shaft by means of threads (216), and shaft seals (217, 218), which provide a frictional coupling. Thus, the sleeve attains the same rotational velocity as the shaft. A clutch (219) is provided, which engages the sleeve when linear translational motion is desired. The difference in rotational velocity of the shaft and the sleeve is translated into linear motion by the threads. The shaft seals also seal the actuator, and reduce contamination.</p> |
