| 摘要 |
PURPOSE:To reduce the operational duty of a switch, widen the operation range of laser, and increase the oscillation efficiency, by dividing a capacitor into two capacitors, connecting them in series, grounding the connection point, connecting the respective capacitors with the respective power supply circuits for low speed charging and high speed charging, and controlling the starting time of glow discharge from the outside. CONSTITUTION:When a switch 17 is closed by a signal from a control apparatus, the charge stored in a capacitor Ca 15 is transferred at a low speed to a capacitor Cd 14 via an inductor 16, and said Ca 14 is pulse-charged. When a switch 7 is closed by a signal from the control apparatus after a specified time, the charge stored in a capacitor Cs 5 is transferred at a high speed to a capacitor Cp 13, and said Cp 13 is pulse-charged. When a switch 18 is closed by a signal from the control apparatus immediately before the charge in the capacitor Cs 5 has transferred to the capacitor Cp 13 after a specified time, the voltage of a capacitor Ct 19 is applied to preliminary electrodes 3a, 3b via branch coils Lb. Thereby a high voltage is applied to a gap 4, and a spark discharge is generated. By virtue of ultraviolet radiation generated by the discharge, laser gas between main electrodes 1, 2 is preliminarily ionized. |
