EXPOSURE APPARATUS,申请号EP19910301974-传众专利搜索

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发明名称	EXPOSURE APPARATUS
摘要
申请公布号	EP0446076(A3)	申请公布日期	1992.05.13
申请号	EP19910301974	申请日期	1991.03.08
申请人	CANON KABUSHIKI KAISHA	发明人	MIZUSAWA, NOBUTOSHI, C/O CANON KABUSHIKI KAISHA;EBINUMA, RYUICHI C/O CANON KABUSHIKI KAISHA;KUROSAWA, HIROSHI, C/O CANON KABUSHIKI KAISHA;UDA, KOJI, C/O CANON KABUSHIKI KAISHA;KARIYA, TAKAO, C/O CANON KABUSHIKI KAISHA;UZAWA, SHUNICHI, C/O CANON KABUSHIKI KAISHA
分类号	G03F7/20;(IPC1-7):G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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