| 摘要 |
PURPOSE:To prevent generation of a new peak and disappearance of an important peak in a mass spectrum by simultaneously applying a primary beam to a plurality of samples converging a plurality of generated secondary ion beams by a converging means, and making the secondary ion beams simultaneously incident upon a magnetic field. CONSTITUTION:Two samples are held to a two-divided target 1 having two holding regions. Next, a primary ion beam is simultaneously irradiated to the two samples by a primary ion irradiating means 2. Then, secondary ions generated from the respective regions are accelerated and converged by a converging means of slit 3 or the like. Besides, the converged secondary ions are simultaneously incident upon between magnetic poles of a magnetism generating means 4. Here, secondary ion beams are selected to a mass corresponding to a magnetic field. The secondary ion beam reaches an ion detecting means 6 via an electric field generating means 5. In this way, mass of the tested sample can be promptly and easily precision-measured by using a mass standard. |
