| 摘要 |
<p>A new and improved process for fabricating thin film resistor type printhead structures useful as ink ejection devices for disposable inkjet pens, and new and useful printheads so made and having either an all-plastic orifice plate construction or a combination metal and plastic orifice plate construction. The present process is carried out by initially providing a dummy substrate or mandrel member (10) upon which the printhead may be constructed. A layer of removal material such as a photoresist polymer (12) is deposited on the upper surface of the dummy substrate (10). Then, a plastic orifice plate member (14) is deposited such as by laminating or spin coating on the exposed surface of the polymer layer, and orifice openings (20) are formed in the plastic orifice plate layer (14). An insulating barrier layer (22) is then deposited on the plastic orifice plate (14) exposed surface and provided therein with firing chambers (32) aligned, respectively, with the orifice openings (20) in the plastic orifice plate member. Then, a thin film resistor type printhead substrate (34) is secured to an exposed surface of the barrier layer (22) and aligned therewith so that a plurality of individually defined heater resistors (36) on the thin film resistor substrate (34) are aligned, respectively, with the firing chambers (32) in the barrier layer and the orifice openings (20) in the plastic and metal orifice plate members. Then, the structure described above is transferred to a suitable solvent station where a selected soak solvent etchant is applied to the photoresist layer (12) on the dummy substrate (10) so that this photoresist layer (12) is now dissolved, carrying with it the dummy substrate (10). <IMAGE></p> |
