| 摘要 |
PURPOSE:To obtain a device in which the precision of the relative positional relation of components is high by forming all of the relative positional relation of the semiconductor laser chip, the detector for detecting a signal, and the hologram of the components on a silicon substrate by using the technique of photolithography. CONSTITUTION:Light emitted from the semiconductor laser chip 1 is reflected by a V-grooved reflector mirror 6, and is emitted upward. The emitted light is collected on a disk 3 by a lens 2, and the reflected light from this desk 3 is diffracted by the hologram 8, and is collected to a photodetector 9. Through this configuration, the relative positional relation of the V-grooved reflector mirror 6, the bonding position of the semiconductor laser chip 1, the photodetector 9, and the hologram 8 can be controlled in a 1mum unit by using the technique of the photolithography, and the device in which the precision of the relational position relation of the components is high can be realized. |
