| 摘要 |
PURPOSE:To correct the warp of a substrate itself by a simple method, and prevent the warp at the time of fixing, by arranging a plurality of those movable clampers, at positions corresponding with reference holes formed at four corners of the substrate, which are provided with reference pins engaging with the reference holes, and moving the clampers in the radial directions with respect to the substrate. CONSTITUTION:In a clamper 14, a reference pin 14-2 is planted at a position corresponding with a reference hole 1a formed at each of the four corners of a substrate 1. A plurality of, e.g. four, clampers 14 are arranged so as to be movable in the radial direction of the substrate 1, e.g. the arrow A direction. The clampers 14 are connected with a driving mechanism 15. A regulation claw 14-3 of each clamper 14 is used as a guide. Each reference pin 14-2 planted on a base 14-1 is engaged with each reference hole la of the substrate 1. The regulation claws 14-3 are moved in the arrow B direction and the arrow C direction. Thereby four corners of the substrate 1 are pinched by the reference pins 14-2 and the regulation claws 14-3, and then each clamper 14 is made to slide in the radial direction, e.g. the arrow A direction by operating the driving mechanism 15. Thus the substrate 1 is fixed. |
