| 摘要 |
<p>PURPOSE:To provide a number of stable elements with higher density in an easy manufacturing process by arranging an electron emitter on part of the side end face of an insulation layer to form a pair of electrodes in the same shape with the insulation layer. CONSTITUTION:Electrode material which is to be a lower electrode 2 is filmed on a board 1. An insulation layer 3 and an upper electrode 4 are filmed so as to be shifted at only one side of the end face from the electrode 2. Unnecessary portions are removed at a time with etching in a photolithograph process. By applying etching only to the unnecessary portions, an electron emission element can be made easily and precisely. Next, a fine-grain film 6 as an electron emitter is placed on one end face between the electrodes 2, 4 to form the electron emission element.</p> |
