发明名称 Method of monitoring focusing condition using rate of change signal at a border in a semiconductor image position sensitive device
摘要 Disclosed is a method of monitoring the state of focusing of an image on a semiconductor image position sensitive device of the type having a photosensitive layer, a resistance layer provided on the photosensitive layer and output terminals provided on the resistance layer. In this method, a bright spot image is moved across a border between a light-insensitive or non-sensitive zone and a light-sensitive zone. The rate of change in the level of an output signal obtained when the bright spot image is moved across the border is then detected. The degree of focusing of the bright spot image is then derived from the state of change in the level of the output signal.
申请公布号 US5113063(A) 申请公布日期 1992.05.12
申请号 US19900604773 申请日期 1990.10.24
申请人 RIKAGAKU KENKYUSHO 发明人 IDESAWA, MASANORI
分类号 G01B11/00;G02B7/32;H01L21/68;H01L27/14;H01L31/16 主分类号 G01B11/00
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