| 摘要 |
<p>PURPOSE:To improve the unevenness of modulation by laminating modulating electrodes through electron emitting elements and an insulating base, and providing a pair of projections projecting to each electrode element to a lower potential side element wiring electrode. CONSTITUTION:Modulating electrodes are laminated through electron emitting elements and an insulating base 1, and a pair of projections 2 projecting to each electron emitting element are provided to a lower potential side element wiring electrode. In this case, the thickness of the base 1 is preferable to be 0.8mm to 1mm in respect of the mechanical strength and the like. And the membranous thickness of the projections 2 of the wiring electrode is necessary to be thicker than the thickness of the element electrode, and normally its thickness L is made 0.05 to 3000mum, while the thickness l of the element electrode is made 0.01 to 500mum. Consequently, a sufficient electron emitting amount can be obtained compared with a conventional way, and an unintentional variation of electron emitting amount in the driving and a modulation unevenness between plural electron beams are improved.</p> |
