SUPERPURIFIER FOR ARGON GAS AND PROCESS FOR PURIFYING ARGON GAS

摘要

The present invention relates to a superpurifier for argon gas and to a process for superpurifying an argon gas. According to the invention, the superpurifier comprises means for contacting an impurity-containing argon gas with a getter material which is an alloy of zirconium, vanadium and iron. The getter material of the superpurifier selectively sorbs impurities from an impurity-containing argon gas thereby producing a purified argon gas. The present invention also relates to a method of purifying an impurity-containing argon gas using this superpurifier. The present invention provides means for obtaining an argon gas of higher purity than can be obtained by prior purifying processes and apparatus.