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发明名称
METHOD FOR REPLACING A DEPOSIT SHIELD IN AN EVACUATED FILM FORMING CHAMBER
摘要
申请公布号
US5112185(A)
申请公布日期
1992.05.12
申请号
US19910756058
申请日期
1991.09.06
申请人
CANON KABUSHIKI KAISHA
发明人
KOIKE, ATSUSHI
分类号
C23C14/00;C23C14/56;C23C16/44;C23C16/54
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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