SOLID STATE LASER DEVICE FOR LITHOGRAPHY LIGHT SOURCE AND SEMICONDUCTOR LITHOGRAPHY METHOD,申请号US19900585925-传众专利搜索

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发明名称	SOLID STATE LASER DEVICE FOR LITHOGRAPHY LIGHT SOURCE AND SEMICONDUCTOR LITHOGRAPHY METHOD
摘要
申请公布号	US5113402(A)	申请公布日期	1992.05.12
申请号	US19900585925	申请日期	1990.09.21
申请人	MITSUI PETROCHEMICAL INDUSTRIES, LTD.	发明人	ITANI, AKIRA;SHIMAZAKI, KAZUO
分类号	G02F1/35;G02F1/37;G03F7/20;H01L21/027;H01S3/108	主分类号	G02F1/35
代理机构		代理人
主权项
地址

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