| 摘要 |
PURPOSE:To improve the resolution of a resist and profile shape and to lower a dimensional change rate by using a compsn. contg. a specific hydroxystyrene polymer. CONSTITUTION:The hydroxystyrene polymer having the unit of formula I and the unit of formula II as its constituting units, a triazine compd. and alkoxymethylated amino resin (B) are incorporated into this compsn. In the formula, Y denotes the group of formula III or IV; R<1> to R<3> respectively denote hydrogen, halogen, etc.; A denotes -SO2 or -CO-. The above-mentioned polymer is formed by dropping a soln. prepd. by dissolving, for example, poly(4- hydroxystyrene) and p-acetoaminobenzenesulfonyl chloride in dimethyl acetoamide, then dissolving the triethylamine into methyl acetoamide to effect reaction. |
