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发明名称
FORMATION OF THIN FILM AND DEVICE THEREFOR
摘要
申请公布号
JPH04136161(A)
申请公布日期
1992.05.11
申请号
JP19900258180
申请日期
1990.09.27
申请人
TONEN CORP
发明人
HIRAYAMA TADASUKE;FUNAOKA HIDEHIKO;ARAI YOSHIHIRO
分类号
C23C14/32;H01L21/203
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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