| 摘要 |
PURPOSE:To improve the resolution of a resist and profile shape and to lower a dimensional change rate by using a compsn. contg. a specific triazine compd. CONSTITUTION:The polyhydroxystyrene triazine compd. (A) and alkoxymethylated amino resin (B) are incorporated into this compsn. The compd. of formula I is preferably used as the component A. In the formula, Z denotes the group of formula II or III; R<1> and R<2> denote 1 to 5C alkyl group; R<3> and R<4> respectively denote hydrogen, hydroxyl group, etc. The more specific example of the component A includes 2-(p-methoxyphenyl)-4, 6-bis(trichloromethyl)-1, 3, 5-triazine, etc. The more specific example of the component B includes a methoxy methylated melamine resion, etc. |
