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经营范围
发明名称
MICROWAVE PLASMA CVD DEVICE
摘要
申请公布号
JPH04136178(A)
申请公布日期
1992.05.11
申请号
JP19900258696
申请日期
1990.09.27
申请人
ITAYA RYOHEI;IDEMITSU PETROCHEM CO LTD
发明人
ITAYA RYOHEI;MASUDA ATSUHIKO
分类号
C23C16/50;C23C16/27;C23C16/511
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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