ANORDNUNG ZUM MESSEN LINEARER ABMESSUNGEN AUF EINER STRUKTURIERTEN OBERFLAECHE EINES MESSOBJEKTES,申请号DE19904035084-传众专利搜索

发明名称	ANORDNUNG ZUM MESSEN LINEARER ABMESSUNGEN AUF EINER STRUKTURIERTEN OBERFLAECHE EINES MESSOBJEKTES
摘要	The device proposed, which is designed to measure linear dimensions on the patterned surface (8) of a body (9), has a pointed sensor tip (7) coupled to a resonator (5) which is connected in turn to an oscillator circuit (10). The device also includes a control circuit (12) which is connected to resonator-position control elements (1, 2) acting at right angles to the surface (8), a shock isolator (6) connected to the control circuit (12) being located between the sensor tip (7) and the resonator (5).
申请公布号	DE4035084(A1)	申请公布日期	1992.05.07
申请号	DE19904035084	申请日期	1990.11.05
申请人	JENOPTIK JENA GMBH, O-6900 JENA, DE	发明人	BARTZKE, KARLHEINZ, DIPL.-ING., O-6902 JENA, DE;THIEMER, ROLF;MENDE, ERHARD;RETSCHKE, BERNHARD, DIPL.-PHYS., O-6900 JENA, DE;KRAUSSE, WOLFGANG, DIPL.-ING., O-6908 JENA, DE;WEIHNACHT, MANFRED, DR.RER.NAT., O-8019 DRESDEN, DE;GUENTER, HELKE, DR.RER.NAT., O-6530 HERMSDORF, DE;HEIM, JOACHIM, DR., O-9262 FRANKENBERG, DE;WEHRSDORFER, EIKE, DIPL.-ING., O-6520 EISENBERG, DE
分类号	G01B7/28;G01B7/34	主分类号	G01B7/28
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