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发明名称
DEVICE FOR FEEDING AND POSITIONING OF SEMICONDUCTOR PLATES FOR CHECKING OF THEIR DIMENSIONS
摘要
申请公布号
SU1732398(A1)
申请公布日期
1992.05.07
申请号
SU19894726080
申请日期
1989.07.31
申请人
FIZIKO-ENERGETICHESKIJ I AN LATVSSR
发明人
SIKA ZIGURD K,SU;KURKALOV IVAN I,SU
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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