发明名称 DISCHARGE-EXCITED PULSE LASER DEVICE
摘要 PURPOSE:To realize switching at higher speed while conducting uniform pre- ionization in conformity with the timing of main discharge by composing a switch requiring the start of the main discharge of charges charging a capacitor of a solid-state switch, in which solid-state elements are coupled in series- parallel, connecting the solid-state switch to an auxiliary electrode through a pre-ionization exclusive circuit from the high tension side of the switch and adjusting the timing of the start of pre-ionization by regulating the length of a pulse forming line. CONSTITUTION:Momentary large currents flowing through a high-tension pulse circuit 20 are divided by a large number of fixed element switches 4F coupled in series-parallel, the area of flow is increased and the large currents are shunted. Consequently, total inductance can be reduced extremely, a delay element is improved and switching operation at high speed is enabled. A circuit for pre-ionization is branched from the high tension side of the switches, and a pulse forming line 11P is adopted and length thereof is adjusted. Accordingly, current delay can be adjusted and the timing of ionization can be controlled, thus leading out electron density stored under a maximum state, then applying currents to a main discharge section at a proper time.
申请公布号 JPH04133378(A) 申请公布日期 1992.05.07
申请号 JP19900256233 申请日期 1990.09.25
申请人 MITSUBISHI ELECTRIC CORP 发明人 WAKATA HITOSHI;HARUTA TAKEO;SUZUKI AKIHIRO
分类号 H01S3/097;H01S3/0977;(IPC1-7):H01S3/097 主分类号 H01S3/097
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