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发明名称
VAKUUMANLAGE ZUR HALBKONTINUIERLICHEN ABSCHEIDUNG VON DUENNEN FILMEN
摘要
申请公布号
DD337001(A5)
申请公布日期
1992.05.07
申请号
DD19900337001
申请日期
1990.01.04
申请人
发明人
分类号
C23C14/24;(IPC1-7):C23C14/24
主分类号
C23C14/24
代理机构
代理人
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地址
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