发明名称 Stödkonstruktion för tunnfilm och förfarande för framställning av den
摘要 <p>The invention relates to a reinforcing structure for a thin film, particularly for an ultrathin film permeable to X-ray and ultraviolet radiation, and a method for manufacturing a reinforcing structure for a thin film with a thickness less than 5 micrometers. According to the invention, on the surface of the thin film, there is formed, in a bakeing treatment of at least one step, a reinforcing structure made of some photosensitive material such as polymer.</p>
申请公布号 FI922060(A0) 申请公布日期 1992.05.07
申请号 FI19920002060 申请日期 1992.05.07
申请人 OUTOKUMPU ELECTRONICS OY 发明人 XX
分类号 G03F7/00;G03F7/09;H01J5/18;H01J47/00;(IPC1-7):H01J/ 主分类号 G03F7/00
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