| 摘要 |
PURPOSE:To enable observation of in slit element constitution of a film in a completely formed film by providing multi-staged slits in front of an X-ray detector which detects X-ray signals from a sample to be observed, and also by providing a cooling measures to the slits. CONSTITUTION:X-ray that is generated from a sample 1 to be observed, is emitted into an X-ray detector 3 via each slit 5 attached to a central opening part in a liquid nitrogen shroud 4. At that occasion, evaporated substances that are evaporated from an evaporation source or re-evaporated from the sample 1, and then emitted into a direction toward the detector 3, stick to surfaces of the shroud 4 and the slit 5, to be trapped there. Also, a cold trap constituted of the shroud 4 and the slit 5, effectively prevents radiation heat, secondary electrons and scattered electrons from the heated-up sample 1, to be emitted into the detector 3, and therewith deterioration of the detector 3 is well prevented.
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