| 摘要 |
PURPOSE:To eliminate the error of an analytical result even if an unknown element is adhered to a sample by measuring the strength of a fluorescent X-ray at two fetch angles for each element to be analyzed, and conducting the quantitative analysis of the sample on the basis of this. CONSTITUTION:A sample 20 having an adhered layer 22 of Zn on a base layer 21 of Zn and Fe is irradiated with X-rays and qualitatively analyzed to confirm that Zn and Fe is contained in the sample 20. Then, an incident X-ray B1 is radiated at a first incident angle phi1 of the degree in which a fluorescent X-ray B23 is detected also from the layer 21 to measure the first strength of the X-ray B2 at a first fetch angle phi1. After measurement of the first strength, the X-ray B1 is radiated at a second incident angle phi2 larger than the incident angle phi1 to measure the second strength of the X-ray B2 at a fetch angle phi2 larger than the fetch angle phi1. Here, the sample 20 contains three unknown letters of the thickness of the adhered layer 22, and the concentration of each element in the layers 22 and 21. Thus, the strength of the fluorescent X-ray B2 is also measured for Fe at both the incident angles phi1, phi2 and both the fetch angles phi1, phi2. On the basis of a plurality of the measured strengths, the quantitative analysis of the sample can be conducted. |
