摘要 |
PURPOSE:To reduce variance in light intensity by equalizing the waveguide width of a coupling part to the sum of the widths of plural waveguides, and also equalizing the waveguide width of a branch part to the sum of the widths of plural branch waveguides. CONSTITUTION:Two waveguides which are coupled into one at the coupling part are as wide as each other and waveguides which are branched at the branch part are also equal in width to each other. Each time waveguides are coupled at a coupling part 4a, the waveguide width is equal to the sum of the widths of the two coupled waveguides, i.e. doubled. At each branch part, the waveguide width is a submultiple of the waveguide width before branching corresponding to the number of branches, i.e. 1/2. Consequently, the variance of projected light among branch waveguides is reducible. |