发明名称 GROWING METHOD OF SEMICONDUCTOR CRYSTAL
摘要 PURPOSE:To grow a semiconductive crystal having P-type electroconductive properties by adding N-atom to a semiconductor belonging to II-VI group compound in the periodical table in a specific condition in a crystal growth by a molecular beam epitaxial method. CONSTITUTION:In a crystal growth of a semiconductor (e.g. ZnSe) belonging to II-VI group compound in the periodical table by a molecular beam epitaxial method, an object is irradiated with N-plasma in growing of said semiconductor to add N-atom to the semiconductor.
申请公布号 JPH04132699(A) 申请公布日期 1992.05.06
申请号 JP19900254411 申请日期 1990.09.25
申请人 NEC CORP 发明人 IWATA HIROSHI
分类号 C30B29/48;C30B23/08;H01L21/203;H01L33/28;H01S5/00 主分类号 C30B29/48
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