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发明名称
ION IMPLANTER AND SETUP METHOD
摘要
申请公布号
JPH04132151(A)
申请公布日期
1992.05.06
申请号
JP19900253306
申请日期
1990.09.21
申请人
FUJITSU LTD
发明人
KUEDA TAKEHIRO
分类号
C23C14/48;H01J37/04;H01J37/09;H01J37/317;H01L21/265
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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