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发明名称
ION SOURCE
摘要
申请公布号
JPH04132146(A)
申请公布日期
1992.05.06
申请号
JP19900251581
申请日期
1990.09.20
申请人
ULVAC JAPAN LTD
发明人
TAKAGI KENICHI;NIHEI HITOSHI;MORIKAWA JUNJI;INOUE NOBUYUKI;TSUBOI HIDEO;HOSHINO AKIRA
分类号
H01J27/18;H01J37/08
主分类号
H01J27/18
代理机构
代理人
主权项
地址
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