| 摘要 |
<p>A superconducting quantum interference device (SQUID) (10) is made with a Josephson junction (14) extending between two layers of superconducting material (22, 32). An insulation layer (34) placed between the superconducting layers (22, 32), in the regions displaced from the Josephson junction (14), is made of a polymeric insulation material such as a polyimide. The insulation material may also be used between other metal layers on the same device, such as a planar coil (42) and resistors (36). The insulation material is preferably applied by a spin-on technique. <IMAGE></p> |
