PLASMA DEPOSITION AND ETCHING OF SUBSTRATES,申请号GB19920006246-传众专利搜索

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发明名称	PLASMA DEPOSITION AND ETCHING OF SUBSTRATES
摘要
申请公布号	GB9206246(D0)	申请公布日期	1992.05.06
申请号	GB19920006246	申请日期	1992.03.23
申请人	INTEGRATED PLASMA LTD	发明人
分类号	C23C16/509;H01J37/32	主分类号	C23C16/509
代理机构		代理人
主权项
地址

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