EXTRACTING METHOD FOR ION BEAM,申请号JP19900250354-传众专利搜索

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发明名称	EXTRACTING METHOD FOR ION BEAM
摘要
申请公布号	JPH04132149(A)	申请公布日期	1992.05.06
申请号	JP19900250354	申请日期	1990.09.21
申请人	KAWASAKI STEEL CORP	发明人	OKIMOTO NOBUYUKI
分类号	H05H7/08;H01J27/08;H01J37/08;H01J37/317;H01L21/265	主分类号	H05H7/08
代理机构		代理人
主权项
地址

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