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发明名称
METHOD FOR CLEANING SUBSTRATE
摘要
申请公布号
JPH04131366(A)
申请公布日期
1992.05.06
申请号
JP19900250387
申请日期
1990.09.21
申请人
NKK CORP
发明人
KANEKO FUMITAKA
分类号
C23C14/02
主分类号
C23C14/02
代理机构
代理人
主权项
地址
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