| 摘要 |
An improved handle for attaching to and supporting a wafer carrier is described in which robotic fixtures of the wafer carrier are utilized. The locking mechanism of the handle engages the robotic fixtures and then a configuration of flanges and shaped voids attaches to the robotic fixtures in a manner which is secure, even at elevated temperatures common to semiconductor manufacturing processes. Manipulation of the handle conveniently detaches the locking mechanism.
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