METHOD FOR PRODUCTION OF FILMS

摘要

PCT No. PCT/JP90/00281 Sec. 371 Date Oct. 1, 1990 Sec. 102(e) Date Oct. 1, 1990 PCT Filed Mar. 5, 1990 PCT Pub. No. WO90/10728 PCT Pub. Date Sep. 20, 1990.In the method of producing a film which comprises transporting ions in the thickness direction of a film in the course of formation thereof and reacting the ions so transported to one surface of the film with a gas in a reaction chamber, the rate of film formation is increased by applying an external electric field in the thickness direction of the film and eliminating electric charges accumulating on the film surface via a plasma established in front of the film. The method is applicable to ionically conductive films of a solid electrolyte fuel cell or the like.