PROCESS FOR PREPARING A METAL SULFIDE THIN FILM

摘要

PCT No. PCT/JP89/00419 Sec. 371 Date Dec. 4, 1989 Sec. 102(e) Date Dec. 4, 1989 PCT Filed Apr. 19, 1989 PCT Pub. No. WO89/10326 PCT Pub. Date Nov. 2, 1989.A uniform and dense (non-porous) thin film of metal sulfide with excellent electric characteristics can be prepared by making into a fine mist an organic compound alone or dissolved in a solvent the organic compound containing at least one metal-sulfur bond in the structure thereof, and spraying the organic compound on a heated substrate.