发明名称 VACUUM SECURITY VALVE HAVING A BUFFER VOLUME
摘要 A vacuum security valve includes a buffer volume in a movable piston. The movable piston has two orifices communicating with the buffer volume, the first orifice communicating with a clearance volume above the piston. A flexible diaphragm is connected to the piston for separating the clearance volume from the remainder of the interior of the valve body. Another orifice, disposed to communicate with the remainder of the interior of the valve body rather than with the clearance volume, is provided in the piston wall, and also communicates with the buffer volume. A solenoid operated valve, which is normally in the opened position, communicates through the valve body with the clearance volume, and also communicates with a vent. The security valve is connected at one port to a vacuum system which is to be protected upon power failure of a vacuum pump. The other port of the security valve is connected to the lines leading to the vacuum pump. Upon failure of power to the vacuum pump, or upon shutdown, the solenoid operated valve moves to its open position, venting the clearance volume and causing movement of the piston downwardly against a seat, thereby substantially preventing influx of air into the vacuum system. The orifices in the movable piston permit equalization of pressure during venting so that the vacuum pump, vacuum pump lines, buffer volume, and clearance volume are all at ambient pressure. In another embodiment, the buffer volume is disposed outside of the valve body, with the movable piston being solid. In this embodiment, the external buffer volume communicates via two orifices with the interior of the valve body, one orifice being above the diaphragm and the other below the diaphragm.
申请公布号 CA1299970(C) 申请公布日期 1992.05.05
申请号 CA19880572337 申请日期 1988.07.18
申请人 MKS INSTRUMENTS INC. 发明人 PEACOCK, ROY N.
分类号 F04B37/16;F16K31/42;F16K51/02 主分类号 F04B37/16
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