| 摘要 |
PURPOSE:To obtain a multilayer ceramic circuit board having low dielectric constant by manufacturing a green sheet from a hollow quartz glass powder as the source material the surface of which is coated with a ceramic thin film containing Al element and laminating these green sheets. CONSTITUTION:The surface of hollow or porous quartz glass powder is coated with a ceramic thin film containing Al as a constitutional element. Then, this coated quartz glass powder, various kinds of borosilicate glass powders, and ceramic powder as the essential components are mixed with a binder resin, plasticizer and solvent, and formed into glass ceramic green sheets. These green sheets are laminated to obtain a laminated body. Then, glass ceramic green sheet containing no hollow nor porous quartz powder are laminated by pressing on both surfaces of the laminated body and calcined. |
