| 摘要 |
PURPOSE:To make it possible to correct the measured value in mapping measurement by obtaining a correcting function in an interpolating mode based on the difference between the intensity of characteristic X rays of an element to be analyzed in the initial measurement and the intensity of the characteristic X rays of an element to be analyzed in the mapping measurement at the same point. CONSTITUTION:A sample is set on a stage. The initial measurement is performed for the intensities of characteristic X rays at, e.g. two points (a) and (b) for an element to be analyzed. The measured value Ic is stored in a memory device. Then, the mapping measurement for an analyzing region is performed, and the measured value Im is stored. The intensity Im of the X rays at the same analyzing point measured in the initial measurement and the value Ic are read out. A correcting function Y is formed by the specified expression in an operating device. Since the function Y is gently changed in time, it is simply considered that the function Y is linearly changed. The function Y can be expressed as the linear expression for the connecting line of the coordinates of the functions Y at the points (a) and (b). In the operating device, the measured value Im at an arbitrary analyzing point is multiplied by the function Y. Thus, the value is corrected to the measured value I' corresponding to the emitted current in reference measurement. The mapping display is performed by using the correcting value I'. |
