SILICON CARBIDE ELECTRODE AND ITS PRODUCTION

摘要

PURPOSE:To obtain an electrode having superior corrosion, oxidation and heat resistance by mixing specified two kinds of SiC powders and sintering the mixture without adding a sintering aid. CONSTITUTION:First SiC of 0.1-10mum average particle size is mixed with second SiC powder of <=0.1mum average particle size and the mixture is sintered without adding a sintering aid to obtain an SiC electrode. This SiC sintered body has <=2.8g/cm<3> density, <=1 OMEGA.cm electric specific resistance at room temp. and >=150W/mk heat conductivity. The second SiC powder is obtd. by bringing gaseous starting material consisting of a silane compd. or silicon halide and hydrocarbon into a vapor phase reaction in plasma in a nonoxidizing atmosphere under <1atm-0.1 Torr pressure.