| 摘要 |
<p>PURPOSE:To store the data of a water test on each chip itself even after having been divided into chips by a method wherein a plurality of thin-film resistors are formed on the surface of the chip. CONSTITUTION:In a water test, resistors 2 selected according to a rule established according to the result of the wafer test are burnt out. The optical reflection factor of the resistors 2 burnt out is lowered. Consequently, when the resistors whose reflection factor has been lowered are detected at a posterior process, it is possible to read out the data of the wafer test by combining the resistors which have been burnt out.</p> |
