APPARATUS FOR EXPOSURE OF LIGHT,申请号JP19900250197-传众专利搜索

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发明名称	APPARATUS FOR EXPOSURE OF LIGHT
摘要
申请公布号	JPH04130710(A)	申请公布日期	1992.05.01
申请号	JP19900250197	申请日期	1990.09.21
申请人	HITACHI LTD	发明人	NAKAYAMA YASUHIKO;SHIBA MASATAKA;KOMORIYA SUSUMU
分类号	G03F7/20;H01L21/027;H01L21/30	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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