VAPOR PHASE CRYSTAL GROWTH APPARATUS,申请号JP19900252570-传众专利搜索

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发明名称	VAPOR PHASE CRYSTAL GROWTH APPARATUS
摘要
申请公布号	JPH04130625(A)	申请公布日期	1992.05.01
申请号	JP19900252570	申请日期	1990.09.20
申请人	MITSUBISHI ELECTRIC CORP	发明人	ONO KENICHI
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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