发明名称 |
PROCESS FOR FABRICATING A SUPERCONDUCTING CIRCUIT |
摘要 |
A process for fabricating a superconducting circuit having patterned superconducting wiring lines each made of a thin film of oxide superconductor deposited on a substrate. The process involves depositing a thin film of an oxide superconductor whole over a surface of the substrate in such a condition that the a-axis of crystals of said thin film orients perpendicularly to said surface of the substrate, forming an oxygen barrier layer through which oxygen can't pass in a desired pattern on a surface of said thin film, subjecting said thin film having said oxygen barrier layer thereon to a deoxygenation treatment to such an extent that exposed portions of said thin film change to no superconductor, and removing said oxygen barrier layer from a surface of said thin film to obtain a planar surface having patterned wiring lines at unexposed portions.
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申请公布号 |
CA2185936(A1) |
申请公布日期 |
1992.05.01 |
申请号 |
CA19912185936 |
申请日期 |
1991.10.31 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES |
发明人 |
NAKAMURA TAKAO;IIYAMA MICHITOMO;INADA HIROSHI |
分类号 |
H01L21/768;H01L23/498;H01L23/532;H01L39/24;(IPC1-7):H01L39/24;H01B12/06 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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