| 摘要 |
<p>PURPOSE:To correct the warpage of a reticule or mask by providing a means for elongating or compressing on frame materials of the pellicle. CONSTITUTION:A rod 6 is inserted into blind holes 4 of the frame materials 2-1 to 2-4 on respective sides of the pellicle frame 2 and the internal thread part 5 thereof is screwed to a threaded part 7. The front end of the screwed rod 6 presses the bottom of the blind holes 4 to slightly elongate the size of the frame materials 2-1 to 2-4. Elongating force is applied to the surface of the reticule or mask 1 in this way. If the reticule or mask 5 is warped, the reticule or mask is so corrected as to be flattened by this elongating force.</p> |
