| 摘要 |
PURPOSE:To make it possible to suppress the effect of an electron beam which is irradiated on a sample on an orbit to the required minimum degree by arranging an electromagnet as a means for generating a magnetic field for removing scattering electrons in front of a detector, and variably controlling the excitation. CONSTITUTION:A sample S is measured at several points in the arbitrary range of the wavelength of an X-ray spectroscope. Then, the maximum exciting current where the detected output of X rays becomes lower than the preset lowest value is obtained based on the relationship between the exciting current for an electromagnet M at each wavelength position stored in a CPU and the output of an X-ray detector D. The relation table of the maximum current and the wavelength position of the X-ray spectroscope is stored in a RAM 6. At this time, the starting wavelength position of the X-ray spectroscope is set at one end of the range wherein wavelength scanning is performed for the sample S. Each wavelength position at the halfway is selected from the wavelength positions where the X-ray peak is not present at an equal interval. As a result, the output of the detector D is only the background component of the X-ray spectrum. Therefore, the exciting current of the electromagnet M is obtained so that the output becomes the value lower than the specified level. |
