| 摘要 |
PURPOSE:To prevent soot particles from being produced by providing at least one outside air suction hole equipped with a filter at part of the wall surface of a chamber and at least one exhaust hole which is connected to a negative pressure mechanism at the other part of the wall surface. CONSTITUTION:The outside air passes through the filter 8 and outside air suction hole 7 by the differential operation of the negative pressure mechanism to flow in the chamber 1 and forms an air flow as shown by an arrow A, and is discharged from the exhaust hole 9. The filter 8 removes dust, etc., from the air flowing in the chamber 1 and thus the air becomes clean. Excessive quartz soot of jetted quartz soot is sucked through a duct 6 and discharged from the chamber 1. The quartz soot which is not discharged through the duct 6 is carried out of the system through the exhaust hole 9 with the formed air flow A. Therefore, the amount of quartz soot suspended in the chamber 1 decreases and the probability that the soot is grown into soot particles becomes small. |
